The fabrication of an integrated circuit (IC) requires a variety of physical and chemical processes performed on a semiconductor (e.g., silicon) substrate. In general, the various processes used to make.. read more

Contact and proximity lithography are the simplest methods of exposing a photoresist through a master pattern called a photomask (Figure above). Contact lithography offers high resolution (down to about the.. read more

Another important aspect of photoresist exposure is the standing wave effect. Monochromatic light, when projected onto a wafer, strikes the photoresist surface over a range of angles, approximating plane waves… read more